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双轴电热机械MEMS微镜的驱动臂交叉耦合模型

Liangliang YANG, Bin HU,Jianmin LI

Journal of Zhejiang Institute of Science and Technology（2020）

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Abstract
根据双轴电热机械MEMS微镜的热力学、机械振动、频率响应和光学动态扫描图形分析,考虑驱动臂轴间交叉耦合情况,建立了双轴电热机械MEMS微镜的驱动臂交叉耦合模型.通过Matlab/Simulink对微镜系统模型进行仿真,并模拟了双轴电热机械MEMS微镜单个驱动臂和两个驱动臂的光学动态扫描模式.将仿真图形与双轴电热机械MEMS微镜动态扫描的实际情况进行对比,结果表明该模型有效仿真出双轴电热机械MEMS微镜的光学动态扫描模式,达到预测该微镜光学动态扫描图形的目的.
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