纳秒脉冲激光对多层介质膜光栅的预处理研究
Journal of Shandong Normal University (Natural Science)（2014）
Abstract
在1-on-1和N-on-1实验对比基础上提出并验证了多层介质膜光栅的激光预处理效应．实验表明激光处理后多层介质膜光栅阈值能提高到处理前的1．5-2倍，激光预处理能够有效减少多层介质膜光栅表面光栅结构区的杂质污染和微结构缺陷，同时不损伤顶层光栅结构．
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Key words
multilayer dielectric gratings,fine structure,laser induced damage,laser-conditioning
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