脉冲激光烧蚀制备纳米硅晶粒成核生长的热力学条件研究
Journal of Synthetic Crystals(2017)
Abstract
文中利用蒙特卡洛方法,引入成核生长模型,研究了纳米硅晶粒成核生长过程.结合宏观阻力模型,计算了纳米硅成核和生长所对应的过饱和度范围.结果显示,衬底的二次溅射,造成成核次数增多,生成小尺寸纳米晶粒的数量增加;晶粒成核过程和生长过程所需要的过饱和度范围不同,过饱和度较大(>2600)时成核次数多生长次数少;而过饱和度在250~2600时生长次数多成核次数少.
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Key words
Monte Carlo method,drag force model,nucleation and growth
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