YBCO大面积超导薄膜沉积工艺与微结构研究
CHINESE JOURNAL OF LOW TEMPERATURE PHYSICS(1999)
Abstract
采用中空柱状阴极直流磁控溅射方法制备了大面积YBCO超导薄膜.应用XRD方法,对在30×30mm2LaAlO3衬底上沉积的YBCO薄膜进行了结晶完整性、均匀性的测定.对同一样品,使用透射电子显微镜对薄膜和衬底间的界面进行了研究.
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