Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

聚酰亚胺在MgB2约瑟夫森结制备中的应用

Song Wang,Bei Liang,Jun Yu,Yong Zhang,Kui Ma,Jian Yang, Chao Liang,Daiqiang Wang

Cryogenics and Superconductivity（2019）

Cited 0|Views9
No score
Abstract
MgB2超导材料由于其优异的超导性能和电学参数,是制作超导集成电路的理想材料之一.制备基于MgB2超导薄膜的高质量约瑟夫森结是超导电子学应用的关键.以聚酰亚胺(PI)为抗蚀层,在MgB2超导薄膜上实现微米量级的图形线条制作,以此工艺为基础,结合MgB2超导薄膜的气相化学沉积和晶型B介质层沉积方法,制作了基于MgB2超导材料的约瑟夫森纵向结阵列,并测试了相应结的约瑟夫森效应.
More
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined