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三维封装铝基板的形变控制研究

刘凯,任卫朋,丁蕾

Technology Innovation and Application（2019）

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Abstract
采用选择穿透性阳极氧化方法制作了一种阵列型三维封装铝基板.利用ANSYS有限元法分析了三维封装铝板的应变,并从铝的纯度和掩膜两个方面优化设计,有效控制了铝板穿透性氧化后的形变和裂纹.
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