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ICP-OES测定高纯硅微粉中的杂质元素

兰绿灯,王峰

Pioneering With Science & Technology Monthly（2016）

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Abstract
利用王水、氢氟酸将高纯硅微粉中的二氧化硅进行消解,再通过高氯酸冒烟赶走多余的氢氟酸及王水,消除基体效应的影响.采用ICP-OES同时测定其中的Fe203、A1203、CaO、MgO,测试结果稳定性高,灵敏度好,适宜推广.
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