Optical and Electron-Beam Recording of Surface Relief’s Using Ge₅As₃₇S₅₈–Se Nanomultilayers as Registering Media

Processes of e-beam and holographic recording of surface-relief structures using Ge5As37S58–Se multilayer nanostructures as registering media were studied in this paper. Optical properties of Ge5As37S58, Se layers and Ge5As37S58–Se multilayer nanostructures were investigated. Spectral dependencies of refractive index were analyzed within the frames of single-oscillator model. Values of optical band gaps for Ge5As37S58, Se layers and Ge5As37S58–Se multilayer nanostructures were obtained from Tauc dependencies. Holographic recording process depends on the polarization of the recording beams. Using e-beam and holographic recording diffraction gratings and other elements were recorded in Ge5As37S58–Se multilayer nanostructures.