浅论气体压强对金刚石薄膜质量的影响
China New Technologies and New Products（2013）
Abstract
以甲烷、氢气做为气源,利用微波等离子气相沉积的方法在硅片上沉积金刚石薄膜.研究了不同压强对金刚石薄膜质量的影响.结果表明当气氛压强为9KPa时可获得高质量的金刚石薄膜.
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