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多功能真空校准装置

Guang-dong PENG,Min LI,Li CHEN,Hong-yu LI, Yu-ting GAN, Wen-xuan XIE

Vacuum（2017）

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Abstract
为满足航天器热试验常用真空计及标准漏孔的校准需要,研制了多功能真空校准装置.该装置可用于进行热偶真空计、压阻规、电容薄膜真空规、潘宁规、热阴极电离规等真空测量传感器的校准,同时也可以用于渗透型真空漏孔的校准.装置选用静态比对法、动态比对法、质谱比对法设计建成,真空校准范围为1.33×105Pa～1×10-4pa,真空漏孔校准范围为5× 10-5～5× 10-9Pa·m3/s,装置智能化水平高,操作简便,适合真空规管的批量校准.
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