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PcBN刀具TiN涂层制备及性能研究

Shuai-fei KONG,Zheng-xin LI,Zhi-qin FAN

Superhard Material Engineering（2018）

Cited 0|Views6
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Abstract
通过JCP-350M2高真空多靶磁控溅射镀膜机,采用直流磁控溅射的方法,在PcBN刀具表面沉积TiN涂层.通过SEM、XRD等方法分析N2流量、Ar流量、温度、电流等参数变化对TiN涂层表面形貌、物相组成、涂层厚度和显微硬度的影响,找出制备TiN涂层的优化参数.
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