Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

常见放气率测试方法的量化比较

Yuhui Guan,Hong Song,Haiyi Dong,Tao Huang,Pengcheng Wang,Jiaming Liu,Shunming Liu,Biao Tan,Xiaoyang Sun

Chinese Journal of Vacuum Science and Technology（2020）

Cited 2|Views20
No score
Abstract
对材料放气率的准确测量至关重要,本文对自主设计出的转换气路(SPP)法测试装置进行了试用,装置重复性较好.将此方法与工程上常用的静态升压法、小孔流导法进行了数量上的直观比较,SPP法比小孔流导法、静态升压法测得的放气率更低.结合molflow模拟,实测值与模拟值相互验证,分析了误差来源,明确了提升方向.
More
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined