常见放气率测试方法的量化比较
Chinese Journal of Vacuum Science and Technology(2020)
Abstract
对材料放气率的准确测量至关重要,本文对自主设计出的转换气路(SPP)法测试装置进行了试用,装置重复性较好.将此方法与工程上常用的静态升压法、小孔流导法进行了数量上的直观比较,SPP法比小孔流导法、静态升压法测得的放气率更低.结合molflow模拟,实测值与模拟值相互验证,分析了误差来源,明确了提升方向.
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