标准厚度块测量温控量化分析
Metrology & Measurement Technique(2015)
Abstract
标准厚度块主要用于测厚仪检测,厚度块的测量无现行的规程、规范,明确其测量的温控范围、测量方法、测量不确定度分析尤为重要。通过建立测量模型,测量不确定度分析,导出厚度块测量温度控制范围,期望在测量中发挥指导作用。
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