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电子束气相沉积的研究进展

Qi Lai,Junhan Li,Enhui Wu,Yan Cui,Liang Li,Xianjie Liao

Iron Steel Vanadium Titanium（2020）

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Abstract
介绍了电子束真空气相沉积(EBPVD)镀膜技术的优点、国内外发展现状,并对其关键技术:材料的高速电子束蒸发过程在真空和工艺参数控制下的物质的沉积、成分和组织结构的控制等方面进行了分析.简要论述了其硬件条件,以便为钢钛复合材料的制备提供解决思路.
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