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铝铜薄膜复合技术的研究现状

Li CHEN,Pifeng XING,Chengfu WEI,Jianjun GUO,Bin JIANG

Hot Working Technology（2014）

Cited 0|Views12
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Abstract
综述了铝、铜薄膜复合技术的研究现状,介绍了气相沉积法和扩散连接方法对铝、铜薄膜的复合.气相沉积分为化学气相沉积和物理气相沉积,最受人们青睐的是物理气相沉积中的磁控溅射沉积法;扩散连接方法中讲述了扩散连接的过程,扩散工艺参数对扩散层组织结构、扩散层厚度的影响.
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