三维铝封装结构设计及互连可靠性研究

Electronic Components & Materials(2016)

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Abstract
针对三维封装热应力失配引发的互连可靠性问题,提出了基于铝基板侧边互连的三维封装方法.应用ANSYS软件建立了COB(Chip on Board,板上芯片)堆叠灌封模型,分析了单层COB及多层COB的应力分布并进行优化,并通过实验进行验证.结果表明,在COB层间增设围坝结构可有效抑制翘曲,经过25~125℃温循,加设围坝的四层COB灌封结构最大变形量为0.081mm,最大等效应力为175MPa,低于硅芯片的断裂强度,层间无开裂,经温循实验后固存读写功能正常.
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