抑制4H-SiC功率器件双极型退化的复合提高层设计

An-li YANG, Zheng-xin WEN,Hua-ping SONG, Xin-he Zhang

Power Electronics(2020)

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Abstract
“双极型退化”是目前影响4H-碳化硅(SiC)双极型器件稳定工作的重要问题.针对此现象,以万伏级的超高压PiN二极管为例,详细介绍在衬底与外延层之间如何设计合适的“复合提高层”以抑制双极型退化.研究了器件工作电流密度和“复合提高层”少子寿命对设计“复合提高层”的影响.结果 表明,在一定的工作电流密度下,“复合提高层”少子寿命越短,所需“复合提高层”厚度越薄.
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