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基于倾斜换能器的高性能声表面波滤波器设计

Meiao LINGHU,Wei WU,Shiyi JIANG,Zhongchao WU,Xiangwei SHEN,Lipeng FU,Yongfeng CHEN

Piezoelectrics & Acoustooptics（2016）

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Abstract
基于倾斜换能器结构,采用112°XY-LiTaO3基片材料,加入群延时波动优化.同时对器件孔径、膜厚、占空比、换能器、反射器的波长及指对数进行优化,得到通带波动小于0.2 dB,群延时波动小于22 ns,矩形系数小于1.6的高性能声表面波滤波器.该文研制的器件具有通带平坦,群延时波动小和矩形度高等特点,有很好的实用性.
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