一种单面无极激励石英晶体谐振频率检测系统
Telecom Power Technologies(2019)
Abstract
采用DDS AD9851模块,以单片机为控制核心,设计可产生调频稳幅高精度正弦波的信号发生器,并以此为激励源,设计了一种单面无极石英晶体谐振的扫频检测系统.以8 MHz为对象,研究单面无极石英晶体在不同条件下的振荡规律,选择最优激励条件:幅度15 V,无线激励距离1 mm,激励面积20 mm2.为了提高谐振频率检测接收信号的信噪比,采用相敏检波方案.仪器性能显示,QCM的频率变化与KCl电导率呈线性相关,QCM对的氢氟酸刻蚀质量响应可达到0.1 ng级别.
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