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一种基于光刻打印技术的5G微波陶瓷介质滤波器的研制

Fuhai LIU,Fuyi CUI,Leiting HAN,Shungang YAO,Bo FANG

Research & Progress of Solid State Electronics（2020）

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Abstract
基于CST2019三维全波电磁场仿真软件和精确的陶瓷材料立体光刻成形技术,研制了一款可用于5G通信的0.9Al2O3-0.1TiO2微波介质陶瓷滤波器.该介质陶瓷中Al2O3和TiO2摩尔比为9∶1.实验结果表明,0.9Al2O3-0.1TiO2微波陶瓷在1 550℃烧结2h,1 000℃后退火5h,具有优异的介电性能,相对介电常数为12.3,品质因子和谐振频率乘积为111 800GHz,温度系数为1.1×10-6/℃.滤波器的插入损耗和回波损耗的测试结果满足5G通信工程要求.
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