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基于MEMS工艺的NO2气体传感器研制

Cheng-yang WANG,Yu-ling LI,Wen-bo DING,Jian-dong JIN,Chong WANG

Transducer and Microsystem Technologies（2018）

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Abstract
设计了一种基于微机电系统(MEMS)工艺的以氧化钨(WO3)为敏感材料的微结构气体传感器,并从半导体理论解释了WO3对二氧化氮(NO2)的敏感机理.气体传感器芯片尺寸为1.3mm ×1.3mm,微热板的有效面积为0.4mm ×0.4 mm.实验结果表明:设计的气体传感器对NO2气体表现出良好的响应,在最佳工作温度下(140℃)功耗为23 mW,最低检测限达50×10-9,响应时间为60 s,恢复时间为180 s.
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