Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

基于等离子体光谱的反应磁控溅射镀膜控制系统

Yiming Cao,Xia Chen,Juntao Cai

Automation & Information Engineering（2017）

Cited 0|Views4
No score
Abstract
为实现精确、稳定、快速的反应溅射镀膜工艺,降低成本,提高品质,设计基于等离子体光谱的反应溅射镀膜控制系统.通过监控反应溅射镀膜过程中等离子体的发射光谱,采用PID算法控制,实时闭环调节反应气体流量.
More
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined