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面向IC芯片的精密立体视觉测量检测平台

Jinfa Chen,Ketian Li,Xiangbo Ouyang,Shaohua Ding

COMPUTER CD SOFTWARE AND APPLICATIONS（2010）

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Abstract
本文综述了国内、外立体视觉检测技术和IC芯片视觉检测设备的发展现状,提出了基于条纹结构光的立体视觉检测方法,并将其应用于IC芯片的测量,结合2D视觉,实现了IC芯片的精密检测平台.
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