Structure And Electrochromic Properties Of Titanium-Doped Wo3 Thin Film By Sputtering

Pure and Ti-doped WO3 thin films prepared by RF (radio-frequency) magnetron at room temperature were determined by XRD, Raman and SEM to analyze the micro-structure and the morphology of the films. In addition, electrochemical workstation and UN-Vis-NIR spectrophotometer were used to measure their cycling stability and optical property. Research results showed that Ti doping had little interference with the surface morphology and optical constants, but the film crystallization temperature could be increased by Ti doping. Electrochemical test results showed that Ti doping could improve reversibility of ion injection and extraction, and improve cycling performance of films. Meanwhile, the switching speed and optical modulation performance of films were enhanced. In detail, the switching time of colored and bleached states were shortened from 9.8 s and 3.5 s to 8.4 s and 2.7 s, respectively. Therefore, Ti doped WO3 thin films has better electrochromic properties.