热解炭涂层在单晶硅用炭/炭热场材料中的应用及研究进展
Carbon(2020)
Abstract
热解炭涂层技术是目前解决单晶硅生产用炭/炭热场材料高温侵蚀的有效方法之一,本文介绍了热解炭涂层的制备技术及优缺点,综述了热解炭涂层在炭/炭热场材料领域的应用及研究进展,对炭/炭热场材料高温抗侵蚀涂层提出了建议和发展方向.
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