A Pot-Like Vibrational Microfluidic Rotational Motor

MICROMACHINES(2021)

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摘要
Constructing a micro-sized microfluidic motor always involves the problem of how to transfer the mechanical energy out of the motor. The paper presents several experiments with pot-like microfluidic rotational motor structures driven by two perpendicular sine and cosine vibrations with amplitudes around 10 mu m in the frequency region from 200 Hz to 500 Hz. The extensive theoretical research based on the mathematical model of the liquid streaming in a pot-like structure was the base for the successful real-life laboratory application of a microfluidic rotational motor. The final microfluidic motor structure allowed transferring the rotational mechanical energy out of the motor with a central axis. The main practical challenge of the research was to find the proper balance between the torque, due to friction in the bearings and the motor's maximal torque. The presented motor, with sizes 1 mm by 0.6 mm, reached the maximal rotational speed in both directions between -15 rad/s to +14 rad/s, with the estimated maximal torque of 0.1 pNm. The measured frequency characteristics of vibration amplitudes and phase angle between the directions of both vibrational amplitudes and rotational speed of the motor rotor against frequency of vibrations, allowed us to understand how to build the pot-like microfluidic rotational motor.
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关键词
microfluidics, micro-sized streaming of a liquid in the pot-like structure, micro-sized rotational motor, piezoelectric driven vibrations
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