Research On Optimization Technology Of High Precision Milling Equipment For Planar Optical Elements

Under the background of high precision machining requirements for planar optical elements, we design the whole machine structure of four-axis special milling equipment. Then we set the necessary materials of equipment components. The precision distribution of the moving parts of the equipment is carried out for the traction of the plane optical element with high-precision and high-efficiency machining, so we design the equipment model. The static simulation analysis was carried out in the two limit states of the equipment model. The basic design model and the optimal design model were compared. In the intermediate processing state, the deformation of the processing point and the driving part of the basic design model was optimized from 0.298 microns and 0.20 microns to 0.172 microns and 0.155 microns of the optimal design model, respectively. The deformation of the processing point and the transmission part of the basic design model was optimized from 0.301 microns and 0.197 microns to 0.197 microns and 0.201 microns of the optimal design model, respectively.