AlN/Pt/LN-Y128 packageless acoustic wave temperature sensor.

Cecile Floer,Omar Elmazria,Natalya Naumenko,Florian Bartoli,Jaafar Ghanbaja,Thierry Aubert,Sami Hage-Ali

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2021）

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摘要

Batteryless, wireless, and packageless acoustic wave sensors are particularly desirable for harsh high-temperature environments. In this letter, an acoustic wave sensor based on a lithium niobate (Y + 128° cut, abbreviated LN-Y128) substrate with a buried platinum interdigital transducer (IDT) in an aluminum nitride (AlN) overlayer is investigated. Previously, it was demonstrated theoretically tha...

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关键词

III-V semiconductor materials,Aluminum nitride,Temperature sensors,Electrodes,Temperature measurement,Sensors,Substrates

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