Band-To-Band Tunneling Mechanism Observed At Room Temperature In Lateral Non-Degenerately Doped Nanoscale P-N And P-I-N Silicon Devices

JAPANESE JOURNAL OF APPLIED PHYSICS(2021)

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摘要
Non-degenerately doped lateral nanoscale p-n and p-i-n silicon-on-insulator devices have been fabricated and characterized at room temperature (297 K). In both types of devices, p-type Si substrate is used as a backgate to modify the potential in the top Si layer in both forward- and reverse-bias regimes. In the forward-bias regime, both types of devices exhibit negative differential transconductance (NDT), with the current peak position and level controlled by the backgate and anode voltage. In the reverse-bias regime, the devices exhibit a sharp current increase as a function of the backgate voltage, which is a signature of the band-to-band tunneling (BTBT) mechanism. These findings suggest that NDT and the sharp increase of current, induced by the contribution of the BTBT mechanism, can be achieved even in non-degenerately doped backgated diodes, which opens new possibilities for BTBT-based functionalities, benefiting from a simple design and CMOS compatibility.
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关键词
Si nanoscale p-n diode, backgated diode, non-degenerate doping, room temperature, band-to-band tunneling, negative differential transconductance
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