High-efficiency normal-incidence germanium photodetector with ultra-thin intrinsic layer

international conference on information photonics(2020)

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摘要
We have designed and realized a high-efficiency normal-incidence germanium photodetector combining with resonant all-dielectric metasurface. With an intrinsic layer thickness of 350 nm, a high external quantum efficiency of 54% is achieved at 1550 nm.
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关键词
intrinsic layer thickness,external quantum efficiency,high-efficiency normal-incidence germanium photodetector,resonant all-dielectric metasurface,size 350.0 nm,wavelength 1550.0 nm,Ge
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