Structural Properties of Fe 3 Si thin Films at Different Pulsed-Laser-Deposition Modes
JOURNAL OF SURFACE INVESTIGATION(2020)
摘要
The formation and investigation of Fe 3 Si thin films by pulsed laser deposition is reported. The structural properties depending on the formation parameters are investigated. Three different approaches to the synthesis of iron-silicide thin films by pulsed laser deposition are explored: deposition from a stoichiometric alloy target, the simultaneous co-deposition of pure Fe and Si targets by two lasers and the single-laser cyclic co-deposition of pure targets.
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关键词
ferromagnetic silicides, thin films, pulsed laser deposition, X-ray diffraction, Rutherford backscattering
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