Absolute Angle-Measurement With A Dihedral Mirror Of The Multi-Longitudinal Mode Laser Self-Mixing Sensor

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY(2021)

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摘要
In this paper, a static multi-longitudinal mode laser self-mixing absolute angle measurement system is developed to accurately monitor the deflection angle. The experimental results show that this multi-longitudinal mode laser angle sensor is capable of effectively measuring the deflection angle of the vertical dihedral mirror. The angle-measurement range and resolution of the self-mixing experimental sensing system can be obtained as +/- 22.0 degrees and 0.008 degrees, respectively. Furthermore, in-depth analysis of the angle-measurement error and related error sources are performed, of which the absolute error is less than 0.37 degrees that demonstrates the good reliability and practicality of the self-mixing angle sensor.
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关键词
Self-mixing, Angle sensor, Dihedral mirror, Multi-longitudinal mode laser, Error
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