A Hybrid Integration Platform of Silicon Photonics

opto electronics and communications conference(2020)

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摘要
In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.
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关键词
silicon photonics, full-wafer measurement, photonic package, high speed modulator, high speed photodetector, laser sub-assembly, fiber array couplers
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