A Hybrid Integration Platform of Silicon Photonics
opto electronics and communications conference(2020)
摘要
In this paper, we demonstrated the hybrid silicon photonics platform developed in ITRI. The functions of this platform include full-wafer high speed photonic measurement, active and passive device fabrication, and the photonic packaging technology.
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关键词
silicon photonics, full-wafer measurement, photonic package, high speed modulator, high speed photodetector, laser sub-assembly, fiber array couplers
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