Shape measurement of a thin glass plate through analyzing dispersion effects in a white-light scanning interferometer
Optics and Lasers in Engineering(2021)
摘要
•Phase position Zp of π nearest to a maximum amplitude position Za in a complex-valued interference signal (CVIS) is analyzed for measuring thickness T of thin glass plates by simulations.•Coefficients that relate the Za and Zp values to the physical thickness T are obtained.•Periodical position jumps occurred in Zp are made clear, and the number of occurrences of the jump is calculated from the Za and Zp values.•In experiments, a shape of 20 μm-thickness glass plate is measured exactly with an accuracy of 6 nm from the Za and Zp values.
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关键词
White-light scanning interferometer,Spectral distribution,Thickness measurement
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