High-quality efficient anti-reflection nanopillar structures layer prepared by a new type vibration-assisted UV nanoimprint lithography

Graphical Abstract: The nanostructures on the hard mold were copied to the master mold by hot nanoimprinting technology, and the master mold was attached to the imprint roller. The micro-vibration was introduced under the photoresist, which will make the nanostructures could be better prepared on the surface of the Si solar cells, so as to improve the performance of solar cells.