Femtosecond Laser-Induced Formation Of Low-Dimensional Thin-Films Elements

The work is devoted to the problem of precision laser micromachining of thin films. Examples of thin-film materials processing by laser radiation sources with different pulse duration are presented. The causes of defects formation in the obtained structures are described, methods for their elimination are proposed. The physical mechanisms of ultrashort laser pulses interaction with thin- film coatings, the influence of radiation parameters on the processing result, and the field of the technological approach application are considered.