Two-axis crosstalk analysis of gimbal-less MEMS scanners with consideration of rotational alignment

Measurement(2021)

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摘要
•Crosstalk was classified as geometrical and mechanical crosstalk.•Fan-shaped distortion changes both the frequency and phase of the crosstalk.•Rotational alignment angle was found to be crucial in the crosstalk analysis.•The mechanical crosstalk specific to scanner was estimated by least squared error.
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关键词
MEMS scanner,Crosstalk,Image distortion,Rotational alignment
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