Iii/V-On-Bulk-Si Technology For Commercially Viable Photonics-Integrated Vlsi

2020 IEEE SYMPOSIUM ON VLSI TECHNOLOGY(2020)

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Abstract
We have demonstrated a complete set of on-chip Si-photonic components using our III/V-on-bulk-silicon (Si) technology. Our bulk-Si-based technology shows unrivaled CMOS compatibility and much improved thermal dissipation, leading to superior performance over the III/V-on-SOI technology at a fraction of cost. The components demonstrated on the bulk-Si platform include single & tunable wavelength laser diodes, semiconductor optical amplifiers, Ge & III/V photodiodes, modulators, waveguides, and couplers. Fabrication of Si-photonics components are all carried out on the same bulk wafers that will host CMOS ICs, and all the fabricated components show robust performance in experimental characterizations. Using these bulk-Si components, a solid-state beam scanner for the light detection and ranging (LiDAR) system is currently under development.The III/V-on-bulk-Si technology will open a new path for silicon photonics to share and enjoy the colossal infrastructure and remarkable commercial success of the CMOS technology in corning years.
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Key words
bulk wafers,silicon photonics,CMOS technology,bulk-silicon components,on-chip silicon-photonic components,III-V-on-SOI technology,light detection and ranging system,LiDAR system,III-V-on-bulk-silicon technology,photonic-integrated VLSI,III-V photodiodes,optical couplers,optical modulators,optical waveguides,semiconductor optical amplifiers,tunable wavelength laser diodes,Si,Ge
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