Demonstration of β-Ga2O3 Junction Barrier Schottky Diodes With a Baliga's Figure of Merit of 0.85 GW/cm2 or a 5A/700 V Handling Capabilities
IEEE Transactions on Power Electronics(2021)
摘要
In this article, we report on demonstrating the first vertical β-Ga
2
O
3
junction barrier Schottky (JBS) diode with the implementation of thermally oxidized p-type NiO to compensate for the dilemma of the forfeit of the p-type β-Ga
2
O
3
. With this wide-bandgap p-type NiOx, β-Ga
2
O
3
JBS diodes with an area of 100 × 100 μm
2
achieve a breakdown voltage (BV) and specific on-resistance Ron,sp of 1715 V and 3.45 mΩ·cm
2
, respectively, yielding a Baliga's figure of merit (FOM) of BV
2
/Ron,sp = 0.85 GW/cm
2
, which is the highest direct-current FOM value among all β-Ga
2
O
3
diodes. Meanwhile, a large size JBS diode with the area of 1 × 1 mm
2
shows a forward current IF and BV of 5 A/700 V, which is also the best IF and BV combinations (FOM = 64 MW/cm
2
) among all published results about large-area Ga
2
O
3
diodes. Dynamic switching characteristics reveal that the diode suffers from a negligible current collapse phenomenon even at a -600 V and 10
3
s stress, showing the great promise of implementing p-NiO in the future β-Ga
2
O
3
power electronic devices.
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关键词
Power semiconductor diodes,power semiconductor switches,schottky diodes
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