Different Cr Contents on the Microstructure and Tribomechanical Properties of Multi-Layered Diamond-Like Carbon Films Prepared by Unbalanced Magnetron Sputtering

To investigate the effects of Cr doping on the microstructure and tribological properties of multi-layered diamond-like carbon (DLC) films, Cr-DLC films with Cr contents ranging from 0 to 22 at.% were deposited on 0Cr19Ni10 stainless steel and Si wafer surfaces by unbalanced magnetron sputtering. The thickness of the transition layer is 180 nm and the Cr-DLC film ranging from 1.3 to 1.5 µm. The microstructure, mechanical and tribological properties of the films were systematically investigated at room temperature in atmospheric environment. Results show that increasing the Cr target current can effectively improve the incident particle density and reduce surface roughness. As a strong carbon metal, Cr has significant influence on the structure and properties of the film for bonding with carbon atoms during deposition. High-energy Cr particles are favorable for films to increase the sp 3 hybrid bond ratio and reduce internal stress. The high-hardness sp 3 hybrid phase, Cr carbide, oxide dispersion can effectively improve the mechanical properties of the film, but overdoping is detrimental for mechanical properties of the film. The internal stress shows a continuous trend of decreasing with the increasing Cr content and it reduced up to 80% compared with pure DLC films. The films prepared with Cr sputtering current of 0.4 A demonstrate the best tribological properties, and the friction coefficient and wear rate are 0.15 and 2.9 × 10 −7 mm 3 /Nm, respectively.