Restoration of integrated circuit terahertz image based on wavelet denoising technique and the point spread function model

•A novel method for terahertz image restoration using wavelet denoising with point spread function model.•The imaging resolution increases with higher frequency; however, the higher the frequency, the lower the SNR of the THz image.•The wavelet denoising method is beneficial to reduce the high frequency noises, which shows a great performance of the image restoration.•The combination of rigrsure threshold and db5 wavelet basis delivers the best IC image.