Spatial Atomic Layer Deposition of Molybdenum Oxide for Industrial Solar Cells

Molybdenum oxide thin films are successfully deposited using spatial atomic layer deposition (SALD), a tool designed for high-throughput industrial film growth. The structural and optical properties of the film are evaluated using ultraviolet photoelectron spectroscopy, high-resolution transmission electron microscopy, and spectroscopic ellipsometry. To demonstrate the applicability of molybdenum oxide in industrial settings the films are applied as hole-selective silicon heterojunction contacts for solar cells. When paired with intrinsic amorphous silicon passivation layers, implied open-circuit voltages of 699 mV are achieved. The carrier transport is unaffected by low-temperature contact anneals up to 300 degrees C with contact resistivities of approximate to 10 m omega cm(2). Finally, the optical performance of silicon solar cells featuring different front hole-selective heterojunction structures are simulated. It is shown that the generation current density of heterojunction solar cells can be significantly increased with the addition of SALD molybdenum oxide contacts.