Design, Fabrication And Characterization Of A Q-Band Patch Antenna Integrated On Stacked Interposers

In this study, we present a Q-band patch antenna with an underling cavity integrated on the stacked high-resistivity Si interposers. A process is developed and sample is fabricated. Evaluation is done and the measurement results shows that it has an operating frequency of 32.75GHz, a -10dB bandwidth of 1.04GHz, a maximum gain of 3dB. Those results prove the feasibility of integrating high-frequency antennas with TSV interposer preliminary.