Synthesis of highly transparent titanium-indium-tin oxide conductive film at low temperatures for application in near-infrared devices

Hyung-Joo Lee,Gwang-Hoon Park,Jin-Su So,Jae-Hoon Kim,Hong-Gun Kim,Lee-Ku Kwac

Infrared Physics & Technology（2020）

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摘要

•Optical transmittance of ITO (Titanium indium tin oxide) was improved by using titanium barrier.•Approximately 2 nm thick titanium barrier was inserted between top ITO film and bottom III-V epi-layer.•Developed TITO (Titanium indium tin oxide) film effectively improved 940 nm near infrared light emitting diode.

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关键词

Titanium,Indium tin oxide,Near-infrared,Light-emitting diode,Transmittance

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