A Dry Lift-Off Method For Patterning Perovskites

Cheng Chang,Chen Zou,Mark Odendahl,Lih Y. Lin

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

In this paper, we demonstrate a new method to pattern perovskites using a dry lift-off process. By utilizing parylene-C as a sacrificial layer, patterns with <12 um features and multi-color patterns can be achieved. (C) 2020 The Author(s)

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关键词

patterning perovskites,multicolor patterns,dry lift-off method,parylene-C,sacrificial layer

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