High-Q Nanomechanical Resonators For Optomechanical Sensing Beyond The Standard Quantum Limit

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

We fabricate high-stress silicon and silicon-nitride based nanomechanical string resonators to study quantum optomechanical interactions. We use phononic band-gap engineering techniques to minimize mechanical energy dissipation in the out-of-plane defect mode of the resonator. (C) 2020 The Author(s)

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关键词

silicon-nitride,high-stress silicon,standard quantum limit,optomechanical sensing,high-q nanomechanical resonators,mechanical energy dissipation,phononic band-gap engineering techniques,quantum optomechanical interactions

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