On-site tetrafluoroethylene gas generation from moderate-pressure pure tetrafluoromethane plasma reactor

Hiromasa Ohmi,Jou Kikura,Tomoyuki Tanaka,Rei Tanaka,Daiki Iino,Itsuko Sakai,Kazuaki Kurihara,Hiroyuki Fukumizu,Junko Abe,Jota Fukuhara,Hisataka Hayashi,Hiroaki Kakiuchi,Kiyoshi Yasutake

Chemical Engineering Science（2021）

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Abstract

•On-site production method of C2F4 and C2F6 from moderate-pressure pure CF4 plasma.•Revealed the gas reaction behaviors as a function of various plasma-generation parameters.•Achieved high CF4 decomposition efficiency by a small-volume plasma (45 µL).•Discussed the generation mechanism of C2F4 and C2F6 gases in the plasma.•Revealed the vital processing parameter for efficient generation of C2F4.

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Key words

Plasma,Tetrafluoromethane,Tetrafluoroethylene,On-site gas production,Fourier-transform infrared spectroscopy

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