Annealing Temperature On Contact Properties Between Nickel Film And Hydrogen-Terminated Single Crystal Diamond

Ohmic contact of nickel on hydrogen-terminated single-crystal diamond film was investigated with an annealing temperature ranging from room temperature to 750 degrees C in hydrogen atmosphere. Nickel film was deposited on a hydrogen-terminated single-crystal diamond surface with gold film in order to protect it from oxidation. Contact properties between nickel and hydrogen-terminated single crystal diamond were measured by a circular transmission line model. The lowest specific contact resistivity was 7.82 x 10(-5)omega cm(2)at annealing temperature of 750 degrees C, indicating good ohmic contact, which reveals improved thermal stability by increasing temperature.