Monolithically Fabricated Subwavelength Grating Filters for O-Band MUX/DEMUX Applications

Francis O. Afzal,Bo Peng,Shuren Hu,Kevin Dezfulian,Karen Nummy,Andy Stricker,Abdelsalam Aboketaf,Crystal Hedges,Dave Riggs,Ken Giewont,Sharon M. Weiss

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

We demonstrate low loss (-1.2dB), high extinction ratio (-30dB) and single-source thermal tunability of the first silicon add/drop subwavelength grating filters fabricated at a CMOS foundry, using a commercial, monolithic silicon photonics technology from GlobalFoundries.

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关键词

GlobalFoundries,CMOS foundry,silicon add-drop subwavelength grating filters,extinction ratio,O-band MUX-DEMUX applications,monolithically fabricated subwavelength grating filters,single-source thermal tunability,monolithic silicon photonics technology,Si

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