High Quality Factor Aluminum Nitride on Sapphire Resonators at Infrared and near Infrared Wavelengths

Yi Sun,Walter Shin,Ping Wang,David Arto Laleyan,Ayush Pandey,Xianhe Liu,Yuanpeng Wu,Mohammad Soltani,Zetian Mi

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2020）

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摘要

We demonstrate low-loss aluminum nitride waveguides and ring resonators on sapphire. The ring resonators on this platform shows a high quality factor above 2.8 million at 1550 nm and above 120, 000 at 780 nm.

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关键词

ring resonators,low-loss aluminum nitride waveguides,sapphire resonators,high quality factor aluminum nitride,size 1550.0 nm,size 780.0 nm,AlN-Al2O3

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